How are VOC Catalysts Used in the Semiconductor Industry?
Due to the precise and complex production processes in the semiconductor industry, from photolithography and etching to cleaning and thin film deposition, large amounts of organic solvents and chemical reagents are used. Among the pollutants generated,
VOCs (volatile organic compounds) are a major challenge to control.
Pollution and Hazards in the Semiconductor Industry
Pollution sources are concentrated in several core processes: In the photolithography process, esters and ketones in the photoresist evaporate; cleaning agents such as isopropanol and acetone, commonly used in the cleaning process, easily generate waste gas; during etching and deposition, fluorine- and chlorine-containing organic solvents and organometallic precursors also release VOCs.
If these VOCs are directly emitted, they can irritate the human respiratory tract in the short term, causing dizziness and nausea; long-term exposure may lead to organ damage and even cancer. At the environmental level, VOCs are key precursors to ozone and photochemical smog, exacerbating air pollution and disrupting the ecological balance.
Purification Principle and Application of
VOC catalysts are one of the core
technologies for semiconductor waste gas treatment. Their core principle is catalytic oxidation: under the action of precious metals such as platinum and palladium or metal oxides such as manganese and cobalt catalysts, VOCs react chemically with oxygen in the air at relatively low temperatures, being efficiently decomposed into harmless carbon dioxide and water, avoiding secondary pollution.
In semiconductor factories, catalysts are often integrated into waste gas treatment equipment. For low-concentration, multi-component VOCs waste gases, precise control of temperature and airflow achieves purification efficiencies exceeding 95%, making them particularly suitable for treating typical pollutants such as isopropanol and ketones emitted during photolithography and cleaning processes.
Environmental Significance and Industry Value
The application of VOC catalysts not only helps semiconductor companies meet stringent environmental regulations but also reduces air pollutant emissions at the source, contributing to regional ozone pollution control. As a "bridge" between high-tech industries and green development, VOC catalysts promote the synergy between "low-carbon production" and "ecological protection" in the semiconductor industry's pursuit of technological breakthroughs, providing crucial support for the sustainable development of the global electronics industry.
Author: Hazel
Date: 2025-10-30
